M. Pudzs . Experimental and numerical investigation of laboratory crystal growth furnace for the development of model-based control of CZ process. Journal of Crystal Growth, 522(), 191 - 194 pp. 2019.
Bibtex citāts:
Bibtex citāts:
@article{12028_2019,
author = {M. Pudzs },
title = {Experimental and numerical investigation of laboratory crystal growth furnace for the development of model-based control of CZ process},
journal = {Journal of Crystal Growth},
volume = {522},
pages = {191 - 194},
year = {2019}
}
author = {M. Pudzs },
title = {Experimental and numerical investigation of laboratory crystal growth furnace for the development of model-based control of CZ process},
journal = {Journal of Crystal Growth},
volume = {522},
pages = {191 - 194},
year = {2019}
}
Anotācija: The presented study is focused on laboratory Czochralski crystal growth experiments and their mathematical modelling. The developed small-scale CZ crystal growth furnace is described as well as the involved automation systems: crystal radius detection by image recognition, temperature sensors, adjustable heater power and crystal pull rate. The CZ-Trans program is used to model the experimental results – transient, 2D axisymmetric simulation software primarily used for modelling of the industrial-scale silicon crystal growth process. Poor agreement with the experimental results is reached; however, the proven ability to perform affordable, small-scale experiments and successfully model their transient behavior, creates a possibility to develop new process automation solutions in the future. © 2019 Elsevier B.V.
Pilnais teksts: 1-s2.0-S0022024819303501-main